Kinetic simulations and photometry measurements of the E-H transition in cylindrical inductively coupled plasmas

نویسندگان

  • S Mattei
  • K Nishida
  • S Mochizuki
  • A Grudiev
  • J Lettry
  • M Q Tran
  • A Hatayama
چکیده

Inductively Coupled Plasmas (ICP) are well known to exhibit two modes of operation: a low density capacitive E-mode and a high density inductive H-mode. In this study we investigate the E-H transition in a cylindrical ICP, and show the e↵ect of an external magnetic cusp field on the transition dynamics. The plasma is simulated by an Electro-Magnetic Particle-In-Cell Monte Carlo Collision code in order to take into account spatio-temporal variations of the plasma dynamics as well as kinetic e↵ects. Simulations are compared to photometry measurements on the Linac4 H ion source plasma chamber. We show that the E-H transition is characterized by strong spatial variations of the plasma parameters, with an axial plasma oscillation in E-mode followed by a centring in the coil region in H-mode. The external magnetic cusp field prevents electrons close to the wall to be accelerated and reduces the inductive power deposition in the plasma. This resulted in a ⇡ 50% higher current to achieve E-H transition compared to the configuration without cusp field. The results indicate possible improvements to the magnetic cusp field configuration in order to achieve optimal power transfer.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

U. KORTSHAGEN AND B. HEIL: ACCEPTED FOR PUBLICATION IN IEEE TRANSACTIONS ON PLASMA SCIENCE 1 Kinetic two-dimensional modeling of inductively coupled plasmas based on a hybrid kinetic approach

| In this paper we present a two-dimensional kinetic model for low-pressure inductively coupled discharges. The kinetic treatment of the plasma electrons is based on a hybrid kinetic scheme in which the range of electron energies is divided into two subdomains: In the low energy range the electron distribution function is determined from the traditional nonlocal approximation. In the high energ...

متن کامل

Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas

Comparisons of 2D fluid simulations with experimental measurements of Ar/Cl2 plasmas in a low-pressure inductively coupled reactor are reported. Simulations show that the wall recombination coefficient of Cl atom (γ ) is a crucial parameter of the model and that neutral densities are very sensitive to its variations. The best agreement between model and experiment is obtained for γ = 0.02, whic...

متن کامل

Four dimensional Fokker-Planck solver for electron kinetics in collisional gas discharge plasmas

Gas discharge plasmas are widely used in many modern technologies. Unique properties of these weaklyionized plasmas are determined by their highly non-equilibrium state: distributions of electrons and ions substantially deviate from (equilibrium) Maxwellian distributions. These deviations are especially important for electrons which are responsible for ionization processes and plasma maintenanc...

متن کامل

Low Temperature Plasma Technology Laboratory Physical Mechanisms in Industrial RF Plasma Sources

RF plasma sources are essential for producing semiconductor chips, but they are developed empirically, with incomplete knowledge of how they work. Inductively coupled plasmas (ICPs) employ rf fields without a dc magnetic field B0 and produce ionization well outside the skin layer. Helicon sources with a B0 can generate much higher densities but pose a number of puzzling physical questions. Of t...

متن کامل

Etching of III-V semiconductors in inductively coupled chlorine plasmas. (Gravure des semi-conducteurs III-V par plasmas inductifs chlorés)

Comparisons of 2D fluid simulations with experimental measurements of Ar/Cl2 plasmas in alow-pressure inductively coupled reactor are reported. Simulations show that the wallrecombination coefficient of Cl atom (γ ) is a crucial parameter of the model and that neutraldensities are very sensitive to its variations. The best agreement between model andexperiment is obtained fo...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2016